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Título Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and others].

Publicación London, UK : William Andrew is an imprint of Elsevier, 2015.
Edición Second edition.
Descripción física 1 online resource : illustrations.
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Colección Micro & nano technologies
ScienceDirect 2015/16
Micro & nano technologies.
Bibliografía Includes bibliographical references and index.
Resumen: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.
Nota Title details screen (ScienceDirect, viewed September 9, 2015).
Materia Microelectromechanical systems.
Microelectromechanical systems -- Materials.
Silicon -- Electric properties.
Microelectromechanical systems. (OCoLC)fst01019745
Microelectromechanical systems -- Materials. (OCoLC)fst01019748
Silicon -- Electric properties. (OCoLC)fst01118637
TECHNOLOGY & ENGINEERING / Mechanical
Autor secundario Tilli, Markku, editor.
OTRO SOPORTE Print version: Handbook of silicon based MEMS materials and technologies. Second edition. Amsterdam, [Netherlands] : William Andrew, c2015 xxxvii, 787 pages Micro & nano technologies. 9780323299657
ISBN 9780323312233 electronic bk.
0323312233 electronic bk.
9780323299657
0323299652
9780323299657
ISBN/ISSN CHVBK 354096818
CHBIS 010528059
DEBSZ 45152912X